Jakschik, Stefan : rechercher sur Z-Library

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1

Crystallization behavior of thin ALD-Al2O3 films

Stefan Jakschik, Uwe Schroeder, Thomas Hecht, Martin Gutsche, Harald Seidl, Johann W. Bartha

Journal:

Thin Solid Films

Année:

2003

Langue:

english

Fichier:

PDF, 152 KB

english, 2003

2

New Materials in Memory Development Sub 50 nm: Trends in Flash and DRAM

Karl Heinz Kuesters, Marc Florian Beug, Uwe Schroeder, Nicolas Nagel, Ulrike Bewersdorff, Gerald Dallmann, Stefan Jakschik, Roman Knoefler, Stephan Kudelka, Christoph Ludwig, Dirk Manger, Wolfgang Mue

Journal:

Advanced Engineering Materials

Année:

2009

Fichier:

PDF, 78 KB

2009

3

Impact of carbon junction implant on leakage currents and defect distribution: Measurement and simulation

Guntrade Roll, Stefan Jakschik, Alexander Burenkov, Matthias Goldbach, Thomas Mikolajick, Lothar Frey

Journal:

Solid-State Electronics

Année:

2011

Langue:

english

Fichier:

PDF, 1.03 MB

english, 2011

4

Influence of Stress-Induced Leakage Current on Reliability of $\hbox{HfSiO}_{x}$

Jakschik, Stefan, Kauerauf, Thomas, Degraeve, R., Hwang, Y. N., Duschl, Rainer, Kerber, Martin, Avellan, Alejandro, Kudelka, S.

Journal:

IEEE Transactions on Device and Materials Reliability

Année:

2007

Langue:

english

Fichier:

PDF, 444 KB

english, 2007

5

The Impact of Stacked Cap Layers on Effective Work Function With HfSiON and SiON Gate Dielectrics

Cho, Hag-Ju, Yu, Hong Yu, Chang, Vincent S., Akheyar, Amal, Jakschik, Stefan, Conard, Thierry, Hantschel, Thomas, Delabie, Annelies, Adelmann, Christoph, Van Elshocht, Sven, Ragnarsson, Lars-Åke, Schr

Journal:

IEEE Electron Device Letters

Année:

2008

Langue:

english

Fichier:

PDF, 345 KB

english, 2008

6

New Materials in Memory Development Sub 50 nm: Trends in Flash and DRAM

Karl Heinz Kuesters, Marc Florian Beug, Uwe Schroeder, Nicolas Nagel, Ulrike Bewersdorff, Gerald Dallmann, Stefan Jakschik, Roman Knoefler, Stephan Kudelka, Christoph Ludwig, Dirk Manger, Wolfgang Mue

Journal:

Advanced Engineering Materials

Année:

2009

Langue:

english

Fichier:

PDF, 999 KB

english, 2009

7

Mechanical stress in ALD-Al2O3 films

Gunter Krautheim, Thomas Hecht, Stefan Jakschik, Uwe Schröder, Wieland Zahn

Journal:

Applied Surface Science

Année:

2005

Langue:

english

Fichier:

PDF, 337 KB

english, 2005

8

Physical characterization of thin ALD–Al2O3 films

Stefan Jakschik, Uwe Schroeder, Thomas Hecht, Dietmar Krueger, Guenther Dollinger, Andreas Bergmaier, Claudia Luhmann, Johann W Bartha

Journal:

Applied Surface Science

Année:

2003

Langue:

english

Fichier:

PDF, 222 KB

english, 2003

9

[IEEE ESSDERC 2010 - 40th European Solid State Device Research Conference - Sevilla, Spain (2010.09.14-2010.09.16)] 2010 Proceedings of the European Solid State Device Research Conference - Carbon junction implant: Effect on leakage currents and defect distribution

Roll, Guntrade, Jakschik, Stefan, Goldbach, Matthias, Mikolajick, Thomas, Frey, Lothar

Année:

2010

Langue:

english

Fichier:

PDF, 735 KB

english, 2010

10

[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Recent Developments in ALD Technology for 50 nm Trench DRAM Applications

Schroeder, Uwe, Jakschik, Stefan, Erben, Elke, Avellan, Alejandro, Kudelka, Stephan P., Kerber, Martin, Link, Angela, Kersch, Alfred

Année:

2006

Langue:

english

Fichier:

PDF, 734 KB

english, 2006

11

[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - NI (PT) SI Thermal Stability Improvement by Carbon Implantation

Mertens, Sofie, Hoffmann, Thomas Y., Vrancken, Christa, Jakschik, Stefan, Richard, Olivier, Verleysen, Eveline, Bender, Hugo, Zhao, Chao, Vandervorst, Wilfried, Absil, Philippe, Lauwers, Anne

Année:

2008

Langue:

english

Fichier:

PDF, 627 KB

english, 2008

12

Pure Air for Ultrashort-Pulse Lasers

Jakschik, Stefan, Türschmann, Volker

Journal:

Laser Technik Journal

Année:

2014

Langue:

english

Fichier:

PDF, 326 KB

english, 2014

13

Particle Filters for Laser Manufacturing

Jakschik, Stefan, Meißner, Stefan, Blei, Steffen

Journal:

Laser Technik Journal

Année:

2016

Langue:

english

Fichier:

PDF, 499 KB

english, 2016